- Turn table
- In-vacuum stepping motor (Oriental Motor)
- Mounting kit
- An vacuum electrical feedthrough
- Motion controller
- 1 x PXI-7344 4-axis mid-range stepper/servo motion controller
- 1 x SHC68-C68-S cable, 2m
- 1 x NI UMI-7774 controller block
- Drive
- Software (Control and Embedded System Software Option)
- NI Motion Assistant
- NI SoftMotion Development Module
Performance requirements
- Material: SUS304
- Pressure: < 10-6 torr
- Rotation angle: -180° to 180° (free rotation is possible)
- Angle resolution: 0.1°
- Maximum rotation speed: 2 rps for full load and 4 rps light load.
- Payload weight: 20 kg
- Manual adjust sensor center height: ±15 mm