Hemispherical air bearing module 測試平台 (updated: 06/25/2021)

The PIglide HB series with spherical air bearings makes unique positioning and simulation applications possible in the fields of research and industry. The bearings offer excellent load capacity and stiffness, and at the same time, inherent friction-free motion on three rotational axes. The spherical bearings, which are often used in research on weightlessness in satellites, are also used in systems for precision chip contacting and optical alignment. Due to the use of spherical bearings at both ends of the drive screw shaft, it is possible to build extremely stiff drive screws. This arrangement allows precision alignment of the drive screw shaft due to the motion of one spherical bearing relative to the other.

Hemispherical Air Bearing Module

Device Hemispherical Air Bearing Module
Manufacturer Physik Instrumente (PI) GmbH & Co. KG.
Model A-654.045 PIglide HB
Function Attitude test , ±45° tip/tilt range, 150 mm diameter, 160 kg load capacity, 1,350 g base mass, 1,475 g sphere mass, 4.21g m2 moment of inertia
Active axes θX, θY,θZ
Rotation range 90° in θX, 90° in θY, and 360° in θZ
Moment of inertia (unloaded, kg-mm2) 4,210 in θX, 4,210 in θY, and 4,210 in θZ
Overall mass 2,825 g
Permissible push force in Z 1,600 N
Material Hardcoat aluminum, stainless steel mounting hardware
Operatingn pressure 515-585 kPa (or 75-85 psi)
Air consumption 28 L min-1
Air quality Clean (filtered up to 1.0 μm or better) - ISO 8573–1 class 1, Oil free - ISO 8573–1 class 1, Dry (-15 °C dew point) - ISO 8573–1 class 3
Platform Minimum: 440 mm
Maximum: 540 mm
Plasma device Backward diffusion plasma source, 2 pieces
Plasma source current control box
10 inch (VF250) plasma device container, 2 pieces
Gas filling Vacuum valve NW25, 2 pieces
Needle valve SS-SS4-VH, 2 pieces
SUS304 tube ¼ inch, 2 pieces

Pedestal

Device Compatible with A-654 PIglide HB Hemispherical Air Bearing Module
Manufacturer Physik Instrumente (PI) GmbH & Co. KG.
Model A-654.PED Pedestal
Function Support the A-654 PIglide HB
Mass 16 kg
Inner length 1500 mm
Dimension 457 mm D x 797 mm H

Air Prep Kit (Filter & Regulation)

Device Air preparation kit, 4-stage
Manufacturer Physik Instrumente (PI) GmbH & Co. KG.
Model A-801.100 Air Prep Kit (Filter & Regulation)
Function Air preparation kit, 4-stage
Maximum flow 60 SCFM (1680 SLPM)
Required compressed air inlet quality (ISO 8573-1) As desired
Max inlet pressure 150 psi (1035 kPa)
Air outlets 1
Compressed air outlet quality (ISO 8573-1) Class 1 (oil and particles)
Materials Aluminum
Mass 4.2 kg
Pressure switch None