Plasma source 電漿源 (updated: 06/22/2021)
To meet the requirement for ionospheric measurement, a back diffusion plasma source will be deployed. The plasma source is installed on the window of a door. The species are changed with fill-in gases. The plasma source is capable to adjust quantities of plasma and provides with plasma density range between 10
3 and 10
6 #/cm
3.
| Device |
DC power supply |
| Manufacturer |
Elektro-Automatik GmbH & Co. KG |
| Model |
PS 9040-120 2U |
| Function |
High current source |
| Input voltage |
AC 230V, 16A, 45-65 Hz, 0-3,000W |
| Output voltage |
DC 0~40V, 0~120A |
| Dimension |
19" mm W x 2U H x 463 mm D |
| Weight |
15 kg |
| Device |
DC power supply |
| Manufacturer |
Elektro-Automatik GmbH & Co. KG |
| Model |
PS 91000-30 3U |
| Function |
High voltage source |
| Input voltage |
AC 400V L1/L2/L3/PE, L1 28A L2/L3 18A, 45-65 Hz, 0-10,000W |
| Output voltage |
DC 0~1,000V, 0~30A, P-out max: 10kW |
| Dimension |
19" mm W x 3U H x 609 mm D |
| Weight |
25 kg |
| Device |
DC power supply |
| Manufacturer |
Nippon Stabilizer Industry Co., Ltd. |
| Model |
SIC-1Z100 |
| Function |
Providing electrical current to heater of plasma source |
| Input voltage |
AC 200V, 3,500VA |
| Output voltage |
DC 0~18V, 0~100A |
| Dimension |
350 mm D x 430 mm W x 130 mm H |
| Weight |
14 kg |
| Cable |
5.5mm2, 10AWG |
| Device |
DC power supply |
| Manufacturer |
Nippon Stabilizer Industry Co., Ltd. |
| Model |
MSA120-05 |
| Function |
Providing voltage to G1 of plasma source |
| Input voltage |
AC 100V, 130VA |
| Output voltage |
DC 0~120V, 0~0.5A |
| Dimension |
242 mm D x 138 mm W x 180 mm H |
| Weight |
5 kg |
| Device |
DC power supply |
| Manufacturer |
Nippon Stabilizer Industry Co., Ltd. |
| Model |
MSA350-015 |
| Function |
Providing voltage to G2 of plasma source |
| Input voltage |
AC 100V, 110VA |
| Output voltage |
DC 0~350V, 0~0.15A |
| Dimension |
242 mm D x 138 mm W x 138 mm H |
| Weight |
5 kg |
| Device |
DC power supply |
| Manufacturer |
Nippon Stabilizer Industry Co., Ltd. |
| Model |
MSA350-015 |
| Function |
Providing voltage to back plate of plasma source |
| Input voltage |
AC 100V, 110VA |
| Output voltage |
DC 0~350V, 0~0.15A |
| Dimension |
242 mm D x 138 mm W x 138 mm H |
| Weight |
5 kg |
| Device |
Gas pressure regulator |
| Manufacturer |
Yutaka Engineering Corporation (Crown) |
| Model |
GF1-2510-RX-V |
| Function |
Releasing gas from cylinder to chamber. |
| Dimension |
108 mm D x 117 mm W x 112 mm H |
| Input entrance |
W22-14 |
| Output entrance |
Rc1/4 |
| High pressure meter |
25 MPa |
| Low pressure meter |
1 MPa |
| Flow |
25L/M |
| Device |
Gas pressure regulator |
| Manufacturer |
Harris |
| Model |
|
| Function |
Releasing gas from cylinder to chamber. |
| Dimension |
|
| Input entrance |
W22-14 |
| Output entrance |
Rc1/4 |
| High pressure meter |
300 bar |
| Low pressure meter |
15 bar |
| Flow |
|
| Device |
Gas pressure regulator |
| Manufacturer |
Advanced Pressure Technology (APTech) |
| Model |
AK1502S |
| Function |
Releasing gas from cylinder to chamber. |
| Dimension |
|
| Input entrance |
W22-14 |
| Output entrance |
Rc1/4 |
| High pressure meter |
241 bar (3500 psi) |
| Low pressure meter |
-1 to 2 bar (-15 to 30 psi) |
| Flow |
0 to 30 slpm (0 to 1 scfm) |
| Device |
Mass flow meter & controller |
| Manufacturer |
Sierra Instruments Inc. |
| Model |
Smart-Trak 2 Model 100L |
| Function |
Controlling the gases into the chamber. |
| Dimension |
5.02" D x 1" W x 5.04" H
129 mm D x 25.4 mm W x 128 mm H |
| Gas and ambient temperature |
0 to 50℃ |
| Fitting |
1/4" compression |
| Mass flow rate |
0 - 10 sccm to 0 - 50 slpm |
| Control range |
2-100% of full scale flow; automatic shut-off at 1.9% |
| Accuracy |
±1.0% of full scale including linearity at operating conditions |
| Dial-a-gas |
±1.0% of full scale in all 10 gases |
| Repeatability |
±0.2% of full scale |
| Temperature coefficient |
±0.05% of full scale per ℃ |
| Pressure coefficient |
±0.15% of full scale per bar |
| Response time |
2 seconds to within ±2% of final value |
| Gas pressure |
500 psig (34.5 barg) maximum |
| Differential pressure requirement for controller |
Optimum: 30-60 psi (2-4 bar) |
| Power requirements |
15-24 VDC ±10%, (230 mA, regulated) for mass flow meter
24 VDC ±10%, (500 mA, regulated) for mass flow controller |
| Control |
Analog output: Linear 4-20 mA; Linear 0-5 VDC; Linear 0-10 VDC; Linear 1-5 VDC
Digital output: RS-232 standard and Pilot module display |
| Wetted material |
316 stainless steel or equivalent; 416 stainless steel; Viton O-ring and valve seat standard. |
| Device |
UV light source |
| Manufacturer |
Hamamatsu Photonics K. K. |
| Model |
S2D2-VUV L10706 |
| Function |
Emitting UV to produce plasma |
| Spectral distribution |
115 to 400 nm |
| Window material |
MgF2 |
| Light angle |
±7.5° |
| Vacuum flange |
ICF-70 rotating flange |
| Cooling method |
Air-cooled (cooled-air: 20 L/min to 30 L/min) |
| Sealing force retention |
Below 1.33x10-4 Pa L/s (10-6 Torr L/s) |
| Weight |
500 g for light source and 120 g for power supply |
| Operating ambient temperature |
+10 to +35°C |
| Operating ambient humidity |
Below 80% (no condensation) |
| Storage temperature |
-10 to +60°C |
| Storage humidity |
Below 80% (no condensation) |
| Warm-up time |
25±5 s |
| Output stability |
0.05% for fluctuation (p-p)(Max.) and ±0.3%/h for drift (Max.) |
| Guaranteed life (230 nm) |
1,000 hours |
| Input voltage (AC) |
100 V to 240 V (100 V/200 V automatic selection), single phase 50 Hz/60Hz |
| Power consumption (Max.) |
40 VA |
