Vacuum gauges 真空計 (updated: 02/07/2011)

Two vacuum gauges are mainly used to monitor the pressure inside the chamber in different vacuum level. They are:
  • Pirani vacuum gauge (in low vacuum)
  • Ionization vacuum gauge (in high vacuum)
Pirani vacuum gauge

Device
Pirani vacuum gauge
Manufacturer ULVAC, Inc.
Model GP-1GRY
Function Measuring chamber pressure under low vacuum state
Input voltage AC 85 ~ 250V, 10 VA (125 V, 10A power requirement)
Dimension 140 mm D x 90 mm W x 100 mm H for power supply
111 mm D x 100 mm W x 100 mm H for A-type meter
Weight 1 kg for control box, 0.44 kg for meter and 0.035 kg for GP-H (detection unit)
Sensors WP-01~03, 16 (GP-H)
WP-04, 05 (GP-BH with clamp)
WPB-10 (GP-BH with cable)
Pressure range 0.4 ~ 2700 Pa

Ionization vacuum gauge meter

Device
Ionization vacuum gauge meter
Manufacturer ULVAC, Inc.
Model GI-TL3
Function Measuring chamber pressure under high vacuum state
Input voltage AC 100±10V, 50/60Hz, single phase, 71 VA, 0.5A
Dimension 240 mm D x 303 mm W x 99 mm H
Weight 5.4 kg
Sensors WI-T or WI-B
Pressure range 1.3x10-5 ~ 6.7x10-1 Pa for WI-T
1.3x10-6 ~ 1.0x10-2 Pa for WI-B