Two vacuum gauges are mainly used to monitor the pressure inside the chamber in different vacuum level. They are:
- Pirani vacuum gauge (in low vacuum)
- Ionization vacuum gauge (in high vacuum)
| Device |  |
| Manufacturer | ULVAC, Inc. |
| Model | GP-1GRY |
| Function | Measuring chamber pressure under low vacuum state |
| Input voltage | AC 85 ~ 250V, 10 VA (125 V, 10A power requirement) |
| Dimension | 140 mm D x 90 mm W x 100 mm H for power supply 111 mm D x 100 mm W x 100 mm H for A-type meter |
| Weight | 1 kg for control box, 0.44 kg for meter and 0.035 kg for GP-H (detection unit) | Sensors | WP-01~03, 16 (GP-H) WP-04, 05 (GP-BH with clamp) WPB-10 (GP-BH with cable) |
| Pressure range | 0.4 ~ 2700 Pa |
Ionization vacuum gauge meter
| Device |  |
| Manufacturer | ULVAC, Inc. |
| Model | GI-TL3 |
| Function | Measuring chamber pressure under high vacuum state |
| Input voltage | AC 100±10V, 50/60Hz, single phase, 71 VA, 0.5A |
| Dimension | 240 mm D x 303 mm W x 99 mm H |
| Weight | 5.4 kg | Sensors | WI-T or WI-B |
| Pressure range | 1.3x10-5 ~ 6.7x10-1 Pa for WI-T 1.3x10-6 ~ 1.0x10-2 Pa for WI-B |