Plasma source 電漿源 (updated: 01/09/2014)

To meet the requirement for ionospheric measurement, a back diffusion plasma source will be deployed. The plasma source is installed on the window of a door. The species are changed with fill-in gases. The plasma source is capable to adjust quantities of plasma and provides with plasma density range between 103 and 106 #/cm3.

Device
DC power supply
Manufacturer Nippon Stabilizer Industry Co., Ltd.
Model SIC-1Z100
Function Providing electrical current to heater of plasma source
Input voltage AC 200V, 3,500VA
Output voltage DC 0~18V, 0~100A
Dimension 350 mm D x 430 mm W x 130 mm H
Weight 14 kg
Cable 5.5mm2, 10AWG

Device
DC power supply
Manufacturer Nippon Stabilizer Industry Co., Ltd.
Model MSA120-05
Function Providing voltage to G1 of plasma source
Input voltage AC 100V, 130VA
Output voltage DC 0~120V, 0~0.5A
Dimension 242 mm D x 138 mm W x 180 mm H
Weight 5 kg

Device
DC power supply
Manufacturer Nippon Stabilizer Industry Co., Ltd.
Model MSA350-015
Function Providing voltage to G2 of plasma source
Input voltage AC 100V, 110VA
Output voltage DC 0~350V, 0~0.15A
Dimension 242 mm D x 138 mm W x 138 mm H
Weight 5 kg

Device
DC power supply
Manufacturer Nippon Stabilizer Industry Co., Ltd.
Model MSA350-015
Function Providing voltage to back plate of plasma source
Input voltage AC 100V, 110VA
Output voltage DC 0~350V, 0~0.15A
Dimension 242 mm D x 138 mm W x 138 mm H
Weight 5 kg

Device
Gas pressure regulator
Manufacturer Yutaka Engineering Corporation (Crown)
Model GF1-2510-RX-V
Function Releasing gas from cylinder to chamber.
Dimension 108 mm D x 117 mm W x 112 mm H
Input entrance W22-14
Output entrance Rc1/4
High pressure meter 25 MPa
Low pressure meter 1 MPa
Flow 25L/M

Device
Gas pressure regulator
Manufacturer Harris
Model
Function Releasing gas from cylinder to chamber.
Dimension
Input entrance W22-14
Output entrance Rc1/4
High pressure meter 300 bar
Low pressure meter 15 bar
Flow

Device
Gas pressure regulator
Manufacturer Advanced Pressure Technology (APTech)
Model AK1502S
Function Releasing gas from cylinder to chamber.
Dimension
Input entrance W22-14
Output entrance Rc1/4
High pressure meter 241 bar (3500 psi)
Low pressure meter -1 to 2 bar (-15 to 30 psi)
Flow 0 to 30 slpm (0 to 1 scfm)

Device
Mass flow meter & controller
Manufacturer Sierra Instruments Inc.
Model Smart-Trak 2 Model 100L
Function Controlling the gases into the chamber.
Dimension 5.02" D x 1" W x 5.04" H
129 mm D x 25.4 mm W x 128 mm H
Gas and ambient temperature 0 to 50℃
Fitting 1/4" compression
Mass flow rate 0 - 10 sccm to 0 - 50 slpm
Control range 2-100% of full scale flow; automatic shut-off at 1.9%
Accuracy ±1.0% of full scale including linearity at operating conditions
Dial-a-gas ±1.0% of full scale in all 10 gases
Repeatability ±0.2% of full scale
Temperature coefficient ±0.05% of full scale per ℃
Pressure coefficient ±0.15% of full scale per bar
Response time 2 seconds to within ±2% of final value
Gas pressure 500 psig (34.5 barg) maximum
Differential pressure requirement for controller Optimum: 30-60 psi (2-4 bar)
Power requirements 15-24 VDC ±10%, (230 mA, regulated) for mass flow meter
24 VDC ±10%, (500 mA, regulated) for mass flow controller
Control
Analog output: Linear 4-20 mA; Linear 0-5 VDC; Linear 0-10 VDC; Linear 1-5 VDC
Digital output: RS-232 standard and Pilot module display
Wetted material 316 stainless steel or equivalent; 416 stainless steel; Viton O-ring and valve seat standard.

Device
UV light source
Manufacturer Hamamatsu Photonics K. K.
Model S2D2-VUV L10706
Function Emitting UV to produce plasma
Spectral distribution 115 to 400 nm
Window material MgF2
Light angle ±7.5°
Vacuum flange ICF-70 rotating flange
Cooling method Air-cooled (cooled-air: 20 L/min to 30 L/min)
Sealing force retention Below 1.33x10-4 Pa L/s (10-6 Torr L/s)
Weight 500 g for light source and 120 g for power supply
Operating ambient temperature +10 to +35°C
Operating ambient humidity Below 80% (no condensation)
Storage temperature -10 to +60°C
Storage humidity Below 80% (no condensation)
Warm-up time 25±5 s
Output stability 0.05% for fluctuation (p-p)(Max.) and ±0.3%/h for drift (Max.)
Guaranteed life (230 nm) 1,000 hours
Input voltage (AC) 100 V to 240 V (100 V/200 V automatic selection), single phase 50 Hz/60Hz
Power consumption (Max.) 40 VA